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A TEM lamella of an SRAM was prepared using a FIB-SEM. The lamella was thinned down to a thickness of 50 nm and various STEM images were observed on the FIB-SEM equipped with a STEM detector. BF-STEM image shows the crystal structure of Poly-Si region and surrounding structures. MADDF-STEM image highlights the barrier metal around the W plug. HAADF-STEM image provides Z-contrast according to the average atomic number. Several nm thick gate oxide layer was clearly observed at higher magnification
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A TEM lamella of an SRAM was prepared using a FIB-SEM. The la…
123 viewsMay 17, 2023
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A TEM lamella of a 176 layered 3D NAND was prepared with uniform thickness throughout whole 11 μm deep channel holes. SiO and Poly Si layers were well observed from top to bottom showing the 100 nm diameter channel holes were thinned down to about 30 nm while keeping their center. The shape of the channel hole joint was also visualized in the middle area. #3DNAND #NAND #ChannelHole #FIB #SEM #FIBSEM #TEM #electronmicroscopy #ElectronMicroscope Available instruments for this measurement are : FIB
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A TEM lamella of a 176 layered 3D NAND was prepared with uniform …
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Real-time STEM on orthogonally-arranged (L-shape) FIB-SEM enabled highly accurate site-specific TEM lamella preparation from 14 nm FinFET. Targeting the gate metal, metal layers (M1) on both sides were completely removed by FIB and low energy Ar ion milling utilizing STEM observation as well as SEM. Available instruments for this measurement are : L-shape FIB-SEM https://www.hitachi-hightech.com/global/science/products/microscopes/focused-ion-beam-systems/nx9000.html Aberration Corrected STEM ht
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Real-time STEM on orthogonally-arranged (L-shape) FIB-SEM enabl…
115 viewsSep 12, 2019
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Automated in-situ TEM sample preparation on a FIB-SEM #AutoMicrosampling #AutoThinning #Lamella #TEMSample #FIB #FIBSEM #electronmicroscopy #ElectronMicroscope For details, please see the description at https://www.youtube.com/watch?v=YFNL9w_7Rjk&list=PL26wsKAGp_QZwiY8L-FToKM2HTPq4AG23&index=75 | Hitachi Electron Microscope
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Automated in-situ TEM sample preparation on a FIB-SEM #AutoMi…
52 viewsJul 6, 2022
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FIB processes for TEM sample prep from microsample extraction out of bulk sample to lamella thinning and eventually Ar ion beam finishing were automated using a FIB-SEM-Ar Triple Beam system. After Auto-Microsampling (in-situ lift out) and auto-thinning processes, Ar ion beam was automatically irradiated to reduce FIB-induced damage to realize unattended TEM lamella preparation. #Cu #CrystalOrientation #EBSD #GrainBoundary #FIB #SEM #FIBSEM #electronmicroscopy #ElectronMicroscope Available instr
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FIB processes for TEM sample prep from microsample extraction out o…
65 viewsSep 13, 2023
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Introducing ZEISS Crossbeam 550 Samplefab! The new FIB-SEM offers fast, fully-automated lamella prep for reliable and efficient TEM sample production. | ZEISS Microscopy
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